IEC 63041-3:2020

IEC 63041-3 ®
Edition 1.0 2020-08
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 3: Physical sensors
Capteurs piézoélectriques –
Partie 3: Capteurs physiques
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IEC 63041-3 ®
Edition 1.0 2020-08
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 3: Physical sensors
Capteurs piézoélectriques –
Partie 3: Capteurs physiques
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
INTERNATIONALE
ICS 31.140 ISBN 978-2-8322-8742-2

– 2 – IEC 63041-3:2020 © IEC 2020
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms, definitions, symbols and units . 5
3.1 Terms and definitions . 5
3.2 Symbols and units. 6
4 Specifications . 6
4.1 General . 6
4.2 Conceptual diagrams of sensor types. 6
4.2.1 General . 6
4.2.2 Conceptual diagram for sensor elements of SAW resonator type . 7
4.2.3 Conceptual diagram for sensor elements of SAW delay-line type . 7
4.3 Technical documents . 8
5 Delivery conditions . 8
6 Quality and reliability . 8
7 Test and measurement procedures . 8
Annex A (informative) Physical reaction in sensor cell and detection method . 9
A.1 Detection and measurement . 9
A.2 Typical formulae for detection methods of physical quantity . 9
A.2.1 General . 9
A.2.2 Non-acoustic type . 9
A.2.3 Acoustic type . 10
A.2.4 Delay-line type. 11
A.3 Calibration . 11
Bibliography . 12

Figure 1 – Conceptual diagram for SAW single resonator type . 7
Figure 2 – Conceptual diagram for SAW differential resonator type . 7
Figure 3 – Conceptual diagram for SAW transmission (two-port) delay-line type . 7
Figure 4 – Conceptual diagram for SAW reflective (one-port) delay-line type . 8

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC SENSORS –
Part 3: Physical sensors
FOREWORD
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International Standard IEC 63041-3 has been prepared by IEC technical committee TC 49:
Piezoelectric, dielectric and electrostatic devices and associated materials for frequency
control, selection and detection.
The text of this International Standard is based on the following documents:
CDV Report on voting
49/1333/CDV 49/1343/RVC
Full information on the voting for the approval of this International Standard can be found in
the report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.

– 4 – IEC 63041-3:2020 © IEC 2020
A list of all part in the IEC 63041 series, published under the general title Piezoelectric
sensors, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to
the specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
PIEZOELECTRIC SENSORS –
Part 3: Physical sensors
1 Scope
This part of IEC 63041 is applicable to piezoelectric physical sensors mainly used in the field
of process control, wireless monitoring, dynamics, thermodynamics, vacuum engineering, and
environmental sciences. This document provides users with technical guidelines as well as
basic knowledge of common physical sensors.
Piezoelectric sensors covered herein are those applied to the detection and measurement of
physical quantities such as force, pressure, torque, viscosity, temperature, film thickness,
acceleration, vibration, and tilt angle.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their
content constitutes requirements of this document. For dated references, only the edition
cited applies. For undated references, the latest edition of the referenced document (including
any amendments) applies.
IEC 60027 (all parts), Letter symbols to be used in electrical technology
IEC 60050-561, International electrotechnical vocabulary – Part 561: Piezoelectric, dielectric
and electrostatic devices and associated materials for frequency control, selection and
detection
IEC 60617:2012, Graphical symbols for diagrams (database available at
http://std.iec.ch/iec60617)
IEC 63041-1:2017, Piezoelectric sensors – Part 1: Generic specifications
IEC 63041-2, Piezoelectric sensors – Part 2: Chemical and biochemical sensors
ISO 80000-1, Quantities and units – Part 1: General
3 Terms, definitions, symbols and units
3.1 Terms and definitions
For the purposes of this document, the terms and definitions given in IEC 60027 (all parts),
IEC 60050-561, IEC 60617, IEC 63041-1, IEC 63041-2 and ISO 80000-1 and the following
apply.
ISO and IEC maintain terminological databases for use in standardization at the following
addresses:
• IEC Electropedia: available at http://www.electropedia.org/
• ISO Online browsing platform: available at http://www.iso.org/obp

– 6 – IEC 63041-3:2020 © IEC 2020
3.1.1
piezoelectric acceleration sensor element
piezoelectric sensor component whose resonance frequency or delay is used to measure the
change in velocity of an object with time
3.1.2
piezoelectric humidity sensor element
piezoelectric sensor component whose resonance frequency or delay is used for dew point
and moisture detection
3.1.3
piezoelectric tilt angle sensor element
piezoelectric sensor component whose resonance frequency or delay is used to measure tilt
angles, elevation, or depression of an object with respect to gravity's detection
3.1.4
piezoelectric vibration sensor element
piezoelectric sensor component whose resonance frequency or delay is used for
measurement of vibration
3.1.5
dual mode sensor
piezoelectric sensor which is able to detect physical quantities from a change in resonance
frequencies of two independent modes on a single piezoelectric plate
Note 1 to entry: In order to achieve improved precision and/or to eliminate undesired influence factors, sensor
solutions are employed that utilize two or more modes. By evaluation of combinations of these modes’ sensitivities
to various ambient conditions, on the one hand, improved detection sensitivity can be achieved, while, on the other
hand, undesirable sensitivities can be reduced or eliminated.
3.1.6
differential sensor
piezoelectric sensor which is able to detect physical quantities from a change in resonance
frequencies or delays of two independent and same micro-acoustic structures assembled on
the same or different piezoelectric plates
3.1.7
multi-measurand sensor
piezoelectric sensor which is able to detect two or more different physical quantities from an
analysis of different sensor responses
3.2 Symbols and units
The symbols and units given in IEC 63041-1 apply.
4 Specifications
4.1 General
Key points of the specification are identified in IEC 63041-1:2017, Clause 5.
4.2 Conceptual diagrams of sensor types
4.2.1 General
In addition to the sensor types listed in IEC 63041-1:2017, Clause 4, specific realizations are
common for surface acoustic wave (SAW) sensors.

4.2.2 Conceptual diagram for sensor elements of SAW resonator type
Figure 1 and Figure 2 show conceptual diagrams for resonator type SAW sensors. Figure 1
provides one resonance which is sensitive to undesirable influence factors such as frequency
pulling. In the case of Figure 2, comprising e.g. a parallel connection of two resonators at
different resonance frequencies, the sensor will be designed to have similar sensitivities of
both resonators to such undesired effects and is therefore suitable to achieve higher accuracy
with respect to the target measurand due to this compensation technique.

Figure 1 – Conceptual diagram for SAW single resonator type

Figure 2 – Conceptual diagram for SAW differential resonator type
4.2.3 Conceptual diagram for sensor elements of SAW delay-line type
Figure 3 shows a transmission type (two-port) and Figure 4 shows a reflective type (one-port).
Reflective delay lines use the SAW propagation path which is evaluated for delay and
attenuation changes twice for incident and reflected wave, and therefore can be designed as
smaller realizations. Reflective delay-line sensors can be designed to feature a unique sensor
identification, in combination with their sensor capabilities, by using several SAW reflector
structures resulting in a characteristic pattern of the reflected signal which can be
distinguished from other sensors using the same frequency range.

Figure 3 – Conceptual diagram for SAW transmission (two-port) delay-line type

– 8 – IEC 63041-3:2020 © IEC 2020

Figure 4 – Conceptual diagram for SAW reflective (one-port) delay-line type
4.3 Technical documents
The physical reaction in sensor cell and detection methods are defined in Annex A.
The following a) to f) shall clearly be defined in the specifications to be concluded between
the manufacturer and customers:
a) Avoidance of coupling of main and unwanted vibration modes;
b) Detection direction of sensor element;
c) Hysteresis of sensor elements;
d) Linearity between sensor outputs and physical quantities to be detected;
e) Overload characteristics by excessive physical quantities to be detected;
f) Response time of sensor elements.
5 Delivery conditions
See IEC 63041-1:2017, Clause 7.
6 Quality and reliability
See IEC 63041-1:2017, Clause 8.
7 Test and measurement procedures
See IEC 63041-1:2017, Annexes A and B.

Annex A
(informative)
Physical reaction in sensor cell and detection method
A.1 Detection and measurement
Generally, detection and measurement items are a) to d).
a) Resonance frequency, delay, and electrical charged voltage covered herein are applied to
the detection and measurement of force, pressure, torque, vibration, acceleration, etc.
b) Resonance frequency, delay or insertion loss / gain covered herein are applied to the
detection and measurement of viscosity.
c) Resonance frequency or delay is applied to the detection and measurement of
temperature.
d) Resonance frequency is applied to the detection and measurement of film thickness.
NOTE An electrical charged voltage is measured by non-acoustic type piezoelectric ceramic and quartz crystal
sensors.
For these specifications, the manufacturer and customer shall have detailed discussions, the
discrepancies shall be eliminated, and the results shall clearly be described in the contract
clause, the requirements specifications of the customer, the delivery specifications thereof or
the like, and shall be settled as one of the contracts with the customer.
A.2 Typical formulae for detection methods of physical quantity
A.2.1 General
Formulae (A.1) to (A.6) presented as below are typical examples applied to physical sensor
elements and cells. For these formulae, the manufacturer and customer shall have detailed
discussions, the discrepancies shall be eliminated, and the results shall be described clearly
in the contract clause.
A.2.2 Non-acoustic type
A.2.2.1 Piezoelectric ceramics
When a sensor element is made of piezoelectric ceramics,
F
V gl33
S
(A.1)
where
V is the voltage;
g is the piezoelectric voltage coefficient;
l is the length of the piezoelectric ceramics element and is the direction in which force is
applied to the one;
F is the force applied to the piezoelectric ceramic element and cell;
S is the electrode area and is formed in a direction in which a force is applied to the
piezoelectric ceramic element and cell.

– 10 – IEC 63041-3:2020 © IEC 2020
A.2.2.2 X-cut quartz crystal
When sensor element is X-cut quartz crystal,
F
V= g t
(A.2)
S
where
g is the piezoelectric voltage coefficient;
t is the thickness of quartz crystal.
A.2.3 Acoustic type
A.2.3.1 Resonator type
For resonator-type piezoelectric sensors, the change of one or more resonance frequencies
related to the effect of the measurand is interpreted to quantify the measurand. Typical
measuring range transform function is defined by polynomials as
N
i
(A.3)
y= g(∆f)= a f
∑
r i r
i=0
where
y is the measurand (e.g. temperature, pressure, film thickness, etc.);
Δf is the change of resonance frequency under the influence of the measurand;
r
a are transform coefficients, determined by design and material system.
i
Biunique the transform function is generally desirable. Hence, the order of the polynomial
should be kept low, ideally N = 1.
A.2.3.2 Differential resonator type
For differential resonator type sensors, it is common to evaluate two resonances with different
sensitivities to the measurand in order to eliminate undesired frequency pulling effects (e.g.
from load pulling effects in wireless piezoelectric sensor systems), such as
i
N
y= g(∆f −∆f )= b(∆f −∆f ) (A.4)
r1 r 2 ∑ i r1 r 2
i=0
where
, Δf are resonance frequencies of two resonators or resonant modes with different
Δf
r1 r2
sensitivities with respect to the measurand, but preferably similar sensitivities with
respect to undesired influence actors;
are transform coefficients, determined by design and material system.
b
i
A.2.3.3 Multi-measurand resonator type
Evaluation of two or more resonators and their resonance frequencies, having arbitrary
sensitivities with respect to the measurands to be quantified, can be transformed by

 
a a ⋅ ⋅ ⋅ a
 
1,0 1,1 1,N
 
y
 
∆f
 
 
 
a a ⋅ ⋅ ⋅ ⋅
2,0 2,1
y
 
 f 
  ∆
 
⋅ ⋅ ⋅ ⋅ ⋅ ⋅
.
 
 
= ⋅ (A.5)
 
 
 
. ⋅ ⋅ ⋅ ⋅ ⋅ ⋅
 
 
  ⋅
.
 
⋅ ⋅ ⋅ ⋅ ⋅ ⋅
 
 
  ⋅
 
y 
 K
a a ⋅ ⋅ ⋅ a
 
K ,0 K ,0 K ,N
 
 
∆f
 N
j n
or higher-order polynomials of ∆f ⋅∆f (i, m∈[1.N]) ,
i m
where
y y are a range of measurands;
1 . K
a are the coefficients of a transform matrix;
k.l
Δf , Δf are the changes in resonance frequencies obtained for 𝑁𝑁 resonators of the
1 N
piezoelectric sensor;
K < N to allow for determination of multiple measurands and compensation for undesired
effects;
j, n are the exponents of higher order polynomial transform functions and should be
kept minimum, e.g. j, n ≤ 2.
A.2.4 Delay-line type
For delay-line type piezoelectric sensors, the change of the delay of the transmitted or
reflected impulses related to the effect of the measurand is interpreted to quantify the
measurand. Typical the transform function is defined by polynomials:
N
i
y= g(∆τ)= c∆τ
(A.6)
∑
i
i=0
y is the measurand (e.g. temperature, pressure, etc.);
Δτ is the change of the delay of the transmitted or reflected signal under the influence of
the measurand;
c are transform coefficients, determined by design and material system.
i
For reflective delay lines of Figure 4, realization and evaluation of multiple reflected signals
are common to enhance sensitivity and/or to enable unique sensor identification, e.g.,
allowing for use of multiple sensors within the same frequency range in wireless sensor
systems.
A.3 Calibration
The calibration method should be specified in the detailed specification and/or contract.

– 12 – IEC 63041-3:2020 © IEC 2020
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