ISO/TC 202/SC 1 - Terminology

This document defines the most commonly used terms for transmission electron microscopy (TEM) specimen preparation using focused ion beam (FIB).

ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate. ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.

ISO 15932:2013 defines terms used in the practice of AEM. It covers both general and specific concepts classified according to their hierarchy in a systematic order. It is applicable to all standardization documents relevant to the practice of AEM. In addition, some parts of this International Standard are applicable to those documents relevant to the practice of related fields (e.g. TEM, STEM, SEM, EPMA, EDX) for the definition of those terms common to them.

ISO 23833:2013 defines terms used in the practices of electron probe microanalysis (EPMA). It covers both general and specific concepts classified according to their hierarchy in a systematic order. ISO 23833:2013 is applicable to all standardization documents relevant to the practices of EPMA. In addition, some parts of ISO 23833:2013 are applicable to those documents relevant to the practices of related fields (SEM, AEM, EDX, etc.) for definition of those terms common to them.

This document defines terms used for the electron backscatter diffraction (EBSD) technique. This document covers both general and specific concepts classified according to their hierarchy in a systematic order. This document is applicable to standardization documents relevant to EBSD practices. In addition, some definitions in this document are applicable to transmission Kikuchi diffraction (TKD).

ISO 22493:2008 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate. The vocabulary is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of the vocabulary are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.

ISO 23833:2006 is a bilingual (English/French) vocabulary which defines terms used in the practices of electron probe microanalysis (EPMA). It covers both general and specific concepts classified according to their hierarchy in a systematic order. It is applicable to all standardization documents relevant to the practices of EPMA. In addition, some parts of the standard are applicable to those documents relevant to the practices of related fields (e.g. SEM, AEM, EDX) for definition of those terms common to them.