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ISO

ISO/TC 107/WG 5 - Atomic layer deposition

Dépôt de couches atomiques

General Information

Status
Active
Work Field
Information technology
Parent
ISO/TC 107 - Metallic and other inorganic coatings
Standardization Organization
ICS
Directive
Mandate
×50
ISO
ISO 19383:2026(Main)
Atomic layer deposition — Chemical characteristics and related process specifications of atomic layer deposition precursors

This document defines the chemical characteristics and related process specifications of atomic layer deposition precursors, including assay content, metal purity and anion content specification.

  • Standard
    13 pages
    English language
    sale 15% off
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Frequently Asked Questions

ISO/TC 107/WG 5 is a Working Group within the International Organization for Standardization (ISO). It is named "Atomic layer deposition". This committee has published 1 standards.

ISO/TC 107/WG 5 develops ISO standards in the area of Information technology. Currently, there are 1 published standards from this working group.

The International Organization for Standardization (ISO) is an independent, non-governmental international organization that develops and publishes international standards. Founded in 1947 and headquartered in Geneva, Switzerland, ISO brings together experts from 170+ member countries to share knowledge and develop voluntary, consensus-based standards that support innovation and provide solutions to global challenges.

A Working Group in ISO is a specialized group responsible for developing standards or technical work within a defined scope. These bodies bring together international experts to create consensus-based standards that support global trade, safety, and interoperability.