ASTM E493-06
(Test Method)Standard Test Methods for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode
Standard Test Methods for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode
SIGNIFICANCE AND USE
Methods A or B are useful in testing hermetically-sealed devices with internal volumes. Maximum acceptable leak rates have been established for microelectronic devices to assure performance characteristics will not be affected by in-leakage of air, water vapor or other contaminants over the projected life expected. Care must be taken to control the bombing pressure, bombing time and dwell time after bombing or the results can vary substantially.
SCOPE
1.1 These test methods cover procedures for testing devices that are sealed prior to testing, such as semiconductors, hermetically enclosed relays, pyrotechnic devices, etc., for leakage through the walls of the enclosure. They may be used with various degrees of sensitivity (depending on the internal volume, the strength of the enclosure, the time available for preparation of test, and on the sorption characteristics of the enclosure material for helium). In general practice the sensitivity limits are from 4.4 1015 to 4.4 10 11 moles/s (109 standard cm3/s to 105 standard cm3/s at 0C) for helium, although these limits may be exceeded by several decades in either direction in some circumstances.
1.2 Two test methods are described:
1.2.1 Test Method ATest part preparation by bombing.
1.2.2 Test Method BTest part preparation by prefilling.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
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Standards Content (Sample)
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Designation:E493–06
Standard Test Methods for
Leaks Using the Mass Spectrometer Leak Detector in the
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Inside-Out Testing Mode
This standard is issued under the fixed designation E493; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
This standard has been approved for use by agencies of the Department of Defense.
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1. Scope cation and Certification in Nondestructive Testing
2 ANSI/ASNT CP-189 ASNT Standard for Qualification and
1.1 These test methods cover procedures for testing de-
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Certification of Nondestructive Testing Personnel
vices that are sealed prior to testing, such as semiconductors,
MIL-STD-410 Nondestructive Testing Personnel Qualifica-
hermetically enclosed relays, pyrotechnic devices, etc., for
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tion and Certification
leakage through the walls of the enclosure. They may be used
NAS-410 Certification and Qualification of Nondestructive
with various degrees of sensitivity (depending on the internal
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Test Personnel
volume, the strength of the enclosure, the time available for
preparation of test, and on the sorption characteristics of the
3. Terminology
enclosure material for helium). In general practice the sensi-
−15 −11 −9
3.1 Definitions—For definitions of terms used in this stan-
tivity limits are from 4.4 310 to 4.4 310 moles/s (10
3 −5 3
dard, see Terminology E1316, Section E.
standard cm /s to 10 standard cm /s at 0°C) for helium,
although these limits may be exceeded by several decades in
4. Summary of Test Methods
either direction in some circumstances.
4.1 These test methods require that the test part contain
1.2 Two test methods are described:
helium at some calculable pressure at the time of test. If the
1.2.1 Test Method A—Test part preparation by bombing.
device cannot be sealed with a known pressure of helium
1.2.2 Test Method B—Test part preparation by prefilling.
inside, it is necessary to “bomb” the part in a helium pressure
1.3 This standard does not purport to address all of the
chamberinordertointroduceheliumintothetestpartifaleak
safety concerns, if any, associated with its use. It is the
exists.
responsibility of the user of this standard to establish appro-
4.2 After the test part has been subjected to helium pressur-
priate safety and health practices and determine the applica-
izing means, it is placed in an enclosure which is then
bility of regulatory limitations prior to use.
evacuatedandcoupledtoamassspectrometerleakdetector.In
the event of a leak, an output signal will be obtained from the
2. Referenced Documents
3 leak detector. If the actual leak rate of the test part must be
2.1 ASTM Standards:
known, this must then be calculated from the output reading
E1316 Terminology for Nondestructive Examinations
and the test parameters.
2.2 Other Documents:
SNT-TC-1A Recommended Practice for Personnel Qualifi-
5. Personnel Qualification
5.1 If specified in the contractual agreement, personnel
performing examinations to these test methods shall be quali-
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These test methods are under the jurisdiction of ASTM Committee E07 on
fiedinaccordancewithanationally-recognizedNDTpersonnel
NondestructiveTestingandarethedirectresponsibilityofSubcommitteeE07.08on
qualification practice or standard, such as ANSI/ASNT CP-
Leak Testing Method.
189, SNT-TC-1A, MIL-STD-410, NAS-410, or a similar
Current edition approved Feb. 1, 2006. Published February 2006. Originally
approved in 1973. Last previous edition approved in 1997 as E493-97. DOI: document and certified by the employer or certifying agency,
10.1520/E0493-06.
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Theinside-outtestingmodeischaracterizedbyanexternalvacuumandinternal
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pressure. This standard covers “evacuated,” “sealed with tracer,” and “air-sealed” AvailablefromAmericanSocietyforNondestructiveTesting(ASNT),P.O.Box
testing procedures shown in Terminology E1316. 28518, 1711 Arlingate Ln., Columbus, OH 43228-0518.
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For referenced ASTM standards, visit the ASTM website, www.astm.org, or Available from Standardization Documents Order Desk, DODSSP, Bldg. 4,
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM Section D, 700 Robbins Ave., Philadelphia, PA 19111-5098.
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Standards volume information, refer to the standard’s Document Summary page on Available fromAerospace IndustriesAssociation ofAmerica, Inc. (AIA), 1250
the ASTM website. Eye St., NW, Washington, DC 20005.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
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E493–06
as applicable. The practice or standard used and its applicable 11. Procedure
revision shall be identifi
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