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ASTM D7980-15

(Guide)

Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry

Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry

SIGNIFICANCE AND USE
4.1 This guide is intended to help analysts in the semiconductor industry. Examples of the usefulness of anion monitoring include: (1) determining when ion-exchange resin beds (in water-purification systems) need to be regenerated, and (2) ensuring that anion levels are low enough to allow the water to be used for the manufacture of semiconductor devices.  
4.2 To ensure that the anions are indeed at low-ppt levels, it is recommended to check the conductivity of a subsample before proceeding with Section 5 of this guide. This check does not need to be exact; its purpose is simply to let the analyst know if the conductivity is higher than that of the highest-level standard solution being tested. Any high reading signifies that the sample, if analyzed, might contaminate the instrument.
SCOPE
1.1 This guide applies to ultrapure water that is thought to contain low ppt (parts-per-trillion, weight/weight) levels of anionic contaminants (for example, bromide, chloride, fluoride, nitrate, nitrite, phosphate, and sulfate). To minimize carry-over problems between analyses, it is best to limit the concentration of any one contaminant to approximately 200 ppt (although this limit is only an approximation and may vary, depending on the user’s application).  
1.2 This guide is intended to help analysts avoid contamination of ultrapure-water samples, since contamination control is the primary challenge when quantifying ppt-level anions in grab samples.  
1.3 This guide does not include recommendations for collecting samples from the water source.  
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

Status
Historical
Publication Date
14-Feb-2015
ICS
71.060.01 - Inorganic chemicals in general
Technical Committee
D19 - Water
Drafting Committee
D19.05 - Inorganic Constituents in Water
Current Stage
Ref Project

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ASTM D7980-15 - Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor IndustryASTM D7980-15 - Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry
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ASTM D7980-15 - Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: D7980 − 15
Standard Guide for
Ion-Chromatographic Analysis of Anions in Grab Samples
1
of Ultrapure Water (UPW) in the Semiconductor Industry
This standard is issued under the fixed designation D7980; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 3. Terminology
1.1 This guide applies to ultrapure water that is thought to 3.1 Definitions:
contain low ppt (parts-per-trillion, weight/weight) levels of
3.1.1 For definitions of terms used in this standard, refer to
anionic contaminants (for example, bromide, chloride, fluoride,
Terminology D1129.
nitrate, nitrite, phosphate, and sulfate). To minimize carry-over
3.2 Acronyms:
problems between analyses, it is best to limit the concentration
3.2.1 HDPE, n—high-density polyethylene
of any one contaminant to approximately 200 ppt (although
3.2.2 IC, n—ion chromatograph
this limit is only an approximation and may vary, depending on
the user’s application). 3.2.3 PEEK, n—polyether ether ketone
3.2.4 ppb, n—parts-per-billion (weight/weight)
1.2 This guide is intended to help analysts avoid contami-
nation of ultrapure-water samples, since contamination control
3.2.5 ppt, n—parts-per-trillion (weight/weight)
is the primary challenge when quantifying ppt-level anions in
3.2.6 UPW, n—ultrapure water
grab samples.
1.3 This guide does not include recommendations for col-
4. Significance and Use
lecting samples from the water source.
4.1 This guide is intended to help analysts in the semicon-
1.4 This standard does not purport to address all of the
ductor industry. Examples of the usefulness of anion monitor-
safety concerns, if any, associated with its use. It is the
ing include: (1) determining when ion-exchange resin beds (in
responsibility of the user of this standard to establish appro-
water-purification systems) need to be regenerated, and (2)
priate safety, health, and environmental practices and deter-
ensuring that anion levels are low enough to allow the water to
mine the applicability of regulatory limitations prior to use.
be used for the manufacture of semiconductor devices.
1.5 This international standard was developed in accor-
dance with internationally recognized principles on standard-
4.2 To ensure that the anions are indeed at low-ppt levels, it
ization established in the Decision on Principles for the is recommended to check the conductivity of a subsample
Development of International Standards, Guides and Recom-
before proceeding with Section 5 of this guide. This check does
mendations issued by the World Trade Organization Technical not need to be exact; its purpose is simply to let the analyst
Barriers to Trade (TBT) Committee.
know if the conductivity is higher than that of the highest-level
standard solution being tested. Any high reading signifies that
2. Referenced Documents
the sample, if analyzed, might contaminate the instrument.
2
2.1 ASTM Standards:
5. Guidelines
D1129 Terminology Relating to Water
D5127 Guide for Ultra-Pure Water Used in the Electronics
5.1 General Considerations:
and Semiconductor Industries
5.1.1 In working with grab samples of ultrapure water,
concentrate on controlling contamination, which is the over-
riding challenge when analyzing for anions in UPW. Precau-
1
This guide is under the jurisdiction of ASTM Committee D19 on Water and is
tions must be taken, including the following. Wear gloves (for
the direct responsibility of Subcommittee D19.05 on Inorganic Constituents in
example, nitrile) that do not shed anions. Do not touch
Water.
anything that might contact the samples. Minimize anionic
Current edition approved Feb. 15, 2015. Published March 2015. DOI: 10.1520/
D7980-15.
contamination in the laboratory air; for example, do not work
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
in the same lab where concentrated mineral acids are being
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
used or where acid fumes might be brought in by means of the
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website. ventilation system.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1

---------------------- Page: 1 ----------------------
D7980 − 15
5.1.2 Use only fresh, running-from-the-tap UPW whenever 5.3.6 After each use, immediately rinse bottles with UPW
water is needed. For guidelines regarding maximum contami- by emptying and then refilling at least 3–4 times. Once the
nation levels allowed in this water, consult Guide D5127; cyc
...

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4.1 This guide is intended to help analysts in the semiconductor industry. Examples of the usefulness of anion monitoring include: (1) determining when ion-exchange resin beds (in water-purification systems) need to be regenerated, and (2) ensuring that anion levels are low enough to allow the water to be used for the manufacture of semiconductor devices.  
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