Standard Test Methods for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode

SIGNIFICANCE AND USE
Test Method A—This test method is the most frequently used in leak testing components. Testing of components is correlated to a standard leak, and the actual leak rate is measured. Acceptance is based on the maximum system allowable leakage. For most production needs, acceptance is based on acceptance of parts leaking less than an established leakage rate, which will ensure safe performance over the projected life of the component. Care must be exercised to ensure that large systems are calibrated with the standard leak located at a representative place on the test volume. As the volume tends to be large (>1 m3) and there are often low conductance paths involved, a check of the response time as well as system sensitivity should be made.
Test Method B—This test method is used for testing vacuum systems either as a step in the final test of a new system or as a maintenance practice on equipment used for manufacturing, environmental test, or conditioning parts. As with Test Method A, the response time and a system sensitivity check may be required for large volumes.
Test Method C—This test method is to be used only when there is no convenient method of connecting the LD to the outlet of the high-vacuum pump. If a helium LD is used and the high-vacuum pump is an ion pump or cryopump, leak testing is best accomplished during the roughing cycle, as these pumps leave a relatively high percentage of helium in the high-vacuum chamber. This will limit the maximum sensitivity that can be obtained.
SCOPE
1.1 These test methods cover procedures for testing the sources of gas leaking at the rate of 4.4 10 14 moles/s (1 109 standard-cm 3/s at 0C) or greater. These test methods may be conducted on any object that can be evacuated and to the other side of which helium or other tracer gas may be applied. The object must be structurally capable of being evacuated to pressures of 0.1 Pa (approximately 103 torr).
1.2 Three test methods are described;
1.2.1 Test Method AFor the object under test capable of being evacuated, but having no inherent pumping capability.
1.2.2 Test Method BFor the object under test with integral pumping capability.
1.2.3 Test Method CFor the object under test as in Test Method B, in which the vacuum pumps of the object under test replace those normally used in the leak detector (LD).
1.3 The values stated in SI units are to be regarded as standard. The values given in brackets are for information only.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

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Status
Historical
Publication Date
31-Jan-2006
Technical Committee
Drafting Committee
Current Stage
Ref Project

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ASTM E1603-99(2006) - Standard Test Methods for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:E1603–99 (Reapproved 2006)
Standard Test Methods for
Leakage Measurement Using the Mass Spectrometer Leak
Detector or Residual Gas Analyzer in the Hood Mode
This standard is issued under the fixed designation E1603; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 2.3 Military Standard:
MIL-STD-410 Nondestructive Testing Personnel Qualifica-
1.1 These test methods cover procedures for testing the
−14
tion and Certification
sources of gas leaking at the rate of 4.4 310 moles/s
−9 3
2.4 AIA Standard:
(1 310 standard-cm /s at 0°C) or greater. These test meth-
NAS-410 Certification and Qualification of Nondestructive
odsmaybeconductedonanyobjectthatcanbeevacuatedand
Test Personnel
to the other side of which helium or other tracer gas may be
applied. The object must be structurally capable of being
3. Terminology
−3
evacuated to pressures of 0.1 Pa (approximately 10 torr).
3.1 Definitions—For definitions of terms used in these test
1.2 Three test methods are described;
methods, see Terminology E1316.
1.2.1 Test Method A—For the object under test capable of
being evacuated, but having no inherent pumping capability.
4. Summary of Test Methods
1.2.2 Test Method B—Fortheobjectundertestwithintegral
4.1 ThesetestmethodsrequireaheliumLDthatcanprovide
pumping capability.
asystemsensitivityof10%orlessoftheintendedleakagerate
1.2.3 Test Method C—For the object under test as in Test
to be measured.
MethodB,inwhichthevacuumpumpsoftheobjectundertest
4.2 Test Method A—This test method is used to helium leak
replace those normally used in the leak detector (LD).
test objects that are capable of being evacuated to a reasonable
1.3 The values stated in SI units are to be regarded as
test pressure by the LD pumps during an acceptable length of
standard.Thevaluesgiveninbracketsareforinformationonly.
time(seeFig.1).Thisrequiresthattheobjectbecleananddry.
1.4 This standard does not purport to address all of the
Auxiliary vacuum pumps having greater capacity than those in
safety concerns, if any, associated with its use. It is the
the LD may be used in conjunction with them. The leak test
responsibility of the user of this standard to establish appro-
sensitivity will be reduced under these conditions.
priate safety and health practices and determine the applica-
4.3 Test Method B—This test method is used to leak test
bility of regulatory limitations prior to use.
equipmentthatcanprovideitsownvacuum(thatis,equipment
that has a built-in pumping system) at least to a level of a few
2. Referenced Documents
2 hundred pascals (a few torr) or lower. Refer to Fig. 2.
2.1 ASTM Standards:
4.4 Test Method C—When a vacuum system is capable of
E1316 Terminology for Nondestructive Examinations
−2
3 producing internal pressures of less than 2 3 10 Pa
2.2 ASNT Standards:
−4
(2 310 torr) in the presence of leaks, these leaks may be
SNT-TC-1A Recommended Practice for Personnel Qualifi-
located and evaluated by the use of either a residual gas
cation and Certification in Nondestructive Testing
analyzer(RGA)orbyusingthespectrometertubeandcontrols
ANSI/ASNT-CP-189 Standard for Qualification and Certi-
fromaconventionalMSLD,providedthattheleakageiswithin
fication of Nondestructive Testing Personnel
thesensitivityrangeoftheRGAorMSLDundertheconditions
existing in the vacuum system. Refer to Fig. 3.
These test methods are under the jurisdiction of ASTM Committee E07 on
5. Significance and Use
NondestructiveTestingandarethedirectresponsibilityofSubcommitteeE07.08on
Leak Testing Method.
5.1 Test Method A—This test method is the most frequently
Current edition approved Feb. 1, 2006. Published February 2006. Originally
used in leak testing components. Testing of components is
approved in 1994. Last previous edition approved in 1999 as E1603-99. DOI:
10.1520/E1603-99R06.
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
Standards volume information, refer to the standard’s Document Summary page on Available from Standardization Documents Order Desk, DODSSP, Bldg. 4,
the ASTM website. Section D, 700 Robbins Ave., Philadelphia, PA 19111-5098.
3 5
AvailablefromAmericanSocietyforNondestructiveTesting(ASNT),P.O.Box Available fromAerospace IndustriesAssociation ofAmerica, Inc. (AIA), 1250
28518, 1711 Arlingate Ln., Columbus, OH 43228-0518. Eye St., NW, Washington, DC 20005.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
E1603–99 (2006)
manufacturing, environmental test, or conditioning parts. As
withTestMethodA,theresponsetimeandasystemsensitivity
check may be required for large volumes.
5.3 Test Method C—This test method is to be used only
when there is no convenient method of connecting the LD to
theoutletofthehigh-vacuumpump.IfaheliumLDisusedand
the high-vacuum pump is an ion pump or cryopump, leak
testingisbestaccomplishedduringtheroughingcycle,asthese
pumps leave a relatively high percentage of helium in the
high-vacuumchamber.Thiswilllimitthemaximumsensitivity
FIG. 1 Test Method A
that can be obtained.
6. Basis of Application
6.1 Personnel Qualification—If specified in the contractual
agreement, personnel performing examinations to these test
methods shall be qualified in accordance with a nationally
recognized NDT personnel qualification practice or standard,
such as ANSI/ASNT-CP-189, SNT-TC-1A, MIL-STD-410,
NAS-410, or a similar document and certified by the employer
or certifying agency, as applicable. The practice or standard
used and its applicable revision shall be identified in the
contractual agreement between the using parties.
7. Interferences
FIG. 2 Test Method B
7.1 Series leaks with an unpumped volume between them
present a difficult if not impossible problem in helium leak
testing. Although the trace gas enters the first leak readily
enough since the pressure difference of helium across the first
leak is approximately one atmosphere, it may take many hours
to build up the partial pressure of helium in the volume
betweenthetwoleakssothatenoughheliumentersthevacuum
system to be detected by the LD. This type of leak occurs
frequently under the following conditions:
7.1.1 Double-welded joints and lap welds,
7.1.2 Double O-rings,
7.1.3 Threaded joints,
7.1.4 Ferrule and flange-type tubing fittings,
7.1.5 Casting with internal voids,
7.1.6 Flat polymer gaskets, and
7.1.7 Unvented O-ring grooves.
7.2 In general, the solution is proper design to eliminate
theseconditions;however,whendoublesealsmustbeused,an
FIG. 3 Test Method C
accessportbetweenthemshouldbeprovidedforattachmentto
the LD. Leaks may then be located from each side of the seal.
The access port can be sealed or pumped continuously after
correlated to a standard leak, and the actual leak rate is
repair by a holding pump (large vacuum system).
measured. Acceptance is based on the maximum system
7.3 Temporarily plugged leaks often occur because of poor
allowable leakage. For most production needs, acceptance is
manufacturing techniques. Water, cleaning solvent, plating,
based on acceptance of parts leaking less than an established
flux, grease, paint, etc. are common problems.These problems
leakage rate, which will ensure safe performance over the
canbeeliminatedtoalargeextentbyproperpreparationofthe
projected life of the component. Care must be exercised to
parts before leak testing. Proper degreasing, vacuum baking,
ensure that large systems are calibrated with the standard leak
and testing before plating or painting are desirable.
located at a representative place on the test volume. As the
7.4 The time constant for evacuation and for the rise of the
volume tends to be large (>1 m ) and there are often low
helium signal is inversely proportional to the pumping speed
conductance paths involved, a check of the response time as
and directly proportional to the volume being evacuated.
well as system sensitivity should be made.
t5 V/S (1)
5.2 Test Method B—This test method is used for testing
vacuum systems either as a step in the final test of a new Low-conductance tubing, or any other flow impedance, can
system or as a maintenance practice on equipment used for reducethepumpingspeedofthesystemverysignificantly,thus
E1603–99 (2006)
extending the system response time constant. If such an 9.3 Disconnect the capsule standard leak from the LD and
impedance connects two volumes under test, a LD connection connect the test system to the LD.
to each volume should be provided.
10. System Calibration and Test Procedure
7.5 When unusually long pumping times are necessary, all
of the connections not being tested should be protected from
10.1 For small-volume tests (a few litres and less) or when
continuous exposure to the helium. This will reduce undesired
the standard leak cannot be attached directly to the test
high-helium background levels due to permeation of helium
component, the instrument calibration shall be used for the
throughtheO-rings.Thiscanbeeffectedbydouble-seals(with
systemcalibration.Thecorrectionfactor(CF)usedtomultiply
evacuation of the space between), or sometimes by more
theinstrumentcalibrationvalueforthesystemleakrateisone.
informal shielding approaches.
10.2 For large-volume systems, attach one of the standard
leaks to the test system at a location that provides the lowest
TEST METHOD A—HELIUM LEAK TESTING OF
conductance path to the LD.
COMPONENTS/SYSTEMS USING THE LD
NOTE 2—If using a capsule leak, open the calibrated leak (CL) and
pump isolation val
...

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